IP Library Granted Patent US 6,447,233
Granted Patent Utility
US 6,447,233 · App. 09/641,996

Automated door assembly for use in semiconductor wafer manufacturing

Inventor: Jeffrey M. Denker
Patented Case View Patent ↗
Granted: Sep 10, 2002 Filed: Aug 18, 2000
Inventor
Jeffrey M. Denker
Assignee (at issue)
PRI Automation, Inc.

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Quick Facts
Patent No.
US 6,447,233
App. No.
09/641,996
Filed
2000-08-18
Granted
2002-09-10
Kind
B1