Granted Patent
Utility
US 6,447,370 · App. 09/836,789
Inline metrology device
Inventor:
Matthew Weldon
Patented Case
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Granted: Sep 10, 2002
Filed: Apr 17, 2001
Inventor
Matthew Weldon
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.