Granted Patent
Utility
US 6,447,372 · App. 09/491,296
Polishing agent for semiconductor substrates
Inventors:
Stephan Bradl, Olaf Heitzsch
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Jan 25, 2000
Inventors
Stephan Bradl
Olaf Heitzsch
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.