Granted Patent
Utility
US 6,448,653 · App. 09/694,993
Method for using low dielectric constant material in integrated circuit fabrication
Inventors:
Derryl D. J. Allman, Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Oct 23, 2000
Inventors
Derryl D. J. Allman
Kenneth P. Fuchs
Gayle W. Miller
Samuel C. Gioia
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.