Granted Patent
Utility
US 6,449,048 · App. 09/569,131
Lateral-scanning interferometer with tilted optical axis
Inventor:
Artur Olszak
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: May 11, 2000
Inventor
Artur Olszak
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.