Granted Patent
Utility
US 6,449,428 · App. 09/209,735
Gas driven rotating susceptor for rapid thermal processing (RTP) system
Inventors:
Helmut Aschner, Andreas Hauke, Karsten Weber, Dieter Zernickel
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Dec 11, 1998
Inventors
Helmut Aschner
Andreas Hauke
Karsten Weber
Dieter Zernickel
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.