Granted Patent
Utility
US 6,451,124 · App. 09/882,207
Process for the chemical treatment of semiconductor wafers
Inventor:
Roland Brunner
Patented Case
View Patent ↗
Granted: Sep 17, 2002
Filed: Jun 15, 2001
Inventor
Roland Brunner
Assignee (at issue)
Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.