IP Library › Granted Patent US 6,451,508
Granted Patent Utility
US 6,451,508 · App. 09/561,472

Plural interleaved exposure process for increased feature aspect ratio in dense arrays

Inventors: Scott Bukofsky, Gerhard Kunkel, Alan C. Thomas
Patented Case View Patent ↗
Granted: Sep 17, 2002 Filed: Apr 28, 2000
Inventors
Scott Bukofsky
Gerhard Kunkel
Alan C. Thomas
Assignees (at issue)
International Business Machines Corporation
Infineon Technologies North America Corp.

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Quick Facts
Patent No.
US 6,451,508
App. No.
09/561,472
Filed
2000-04-28
Granted
2002-09-17
Kind
B1