IP Library Granted Patent US 6,452,686
Granted Patent Utility
US 6,452,686 · App. 10/114,750

Method and system for high speed measuring of microscopic targets

Inventors: Donald J. Svetkoff, Donald B. T. Kilgus, Jonathan S. Ehrmann
Patented Case View Patent ↗
Granted: Sep 17, 2002 Filed: Apr 2, 2002
Inventors
Donald J. Svetkoff
Donald B. T. Kilgus
Jonathan S. Ehrmann
Assignee (at issue)
General Scanning, Inc.

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Quick Facts
Patent No.
US 6,452,686
App. No.
10/114,750
Filed
2002-04-02
Granted
2002-09-17
Kind
B1