IP Library Granted Patent US 6,453,063
Granted Patent Utility
US 6,453,063 · App. 09/238,435

Automatic focused ion beam imaging system and method

Inventors: Michael William Phaneuf, Dick James, Julia Elvidge, Pierrette M. Breton, Terry Ludlow, David F. Skoll, Bryan Socransky, Louise Weaver, Ray Haythornthwaite
Patented Case View Patent ↗
Granted: Sep 17, 2002 Filed: Jan 28, 1999
Inventors
Michael William Phaneuf
Dick James
Julia Elvidge
Pierrette M. Breton
Terry Ludlow
David F. Skoll
Bryan Socransky
Louise Weaver
Ray Haythornthwaite
Assignee (at issue)
CHIPWORKS INCORPORATED

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Quick Facts
Patent No.
US 6,453,063
App. No.
09/238,435
Filed
1999-01-28
Granted
2002-09-17
Kind
B1