Granted Patent
Utility
US 6,453,083 · App. 09/483,276
Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
Inventors:
Anis Husain, Li Fan
Patented Case
View Patent ↗
Granted: Sep 17, 2002
Filed: Jan 13, 2000
Inventors
Anis Husain
Li Fan
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.