Granted Patent
Utility
US 6,454,635 · App. 09/633,958
Method and apparatus for a wafer carrier having an insert
Inventors:
Guoqiang Zhang, Yun-Biao Xin, Henry F. Erk
Patented Case
View Patent ↗
Granted: Sep 24, 2002
Filed: Aug 8, 2000
Inventors
Guoqiang Zhang
Yun-Biao Xin
Henry F. Erk
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.