Granted Patent
Utility
US 6,458,013 · App. 09/628,962
Method of chemical mechanical polishing
Inventors:
Nannaji Saka, Jiun-Yu Lai, Hilario Oh
Patented Case
View Patent ↗
Granted: Oct 1, 2002
Filed: Jul 31, 2000
Inventors
Nannaji Saka
Jiun-Yu Lai
Hilario Oh
Assignees (at issue)
ASML US, LLC
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.