Granted Patent
Utility
US 6,458,263 · App. 09/677,041
Cantilevered multilevel LIGA devices and methods
Inventors:
Alfredo M. Morales, Linda A. Domeier
Patented Case
View Patent ↗
Granted: Oct 1, 2002
Filed: Sep 29, 2000
Inventors
Alfredo M. Morales
Linda A. Domeier
Assignee (at issue)
Sandia National Laboratory
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.