Granted Patent
Utility
US 6,458,290 · App. 09/642,682
Isolation and/or removal of ionic contaminants from planarization fluid compositions using macrocyclic polyethers
Inventor:
Brian Marshall
Patented Case
View Patent ↗
Granted: Oct 1, 2002
Filed: Aug 21, 2000
Inventor
Brian Marshall
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.