Granted Patent
Utility
US 6,458,652 · App. 09/933,913
Methods of forming capacitor electrodes
Inventors:
Shenlin Chen, Er-Xuan Ping
Patented Case
View Patent ↗
Granted: Oct 1, 2002
Filed: Aug 20, 2001
Inventors
Shenlin Chen
Er-Xuan Ping
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.