Granted Patent
Utility
US 6,459,947 · App. 09/970,765
Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position
Inventors:
Noriyuki Hirata, Syoji Komatsu
Patented Case
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Granted: Oct 1, 2002
Filed: Oct 5, 2001
Inventors
Noriyuki Hirata
Syoji Komatsu
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.