Granted Patent
Utility
US 6,461,222 · App. 09/539,379
Planarizing and polishing apparatus and planarizing and polishing method
Inventor:
Shuzo Sato
Patented Case
View Patent ↗
Granted: Oct 8, 2002
Filed: Mar 31, 2000
Inventor
Shuzo Sato
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.