Granted Patent
Utility
US 6,461,444 · App. 09/531,933
Method and apparatus for manufacturing semiconductor device
Inventors:
Hitoshi Nishio, Hideo Yamagishi, Masataka Kondo
Patented Case
View Patent ↗
Granted: Oct 8, 2002
Filed: Mar 21, 2000
Inventors
Hitoshi Nishio
Hideo Yamagishi
Masataka Kondo
Assignee (at issue)
KANEKA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.