IP Library › Granted Patent US 6,462,367
Granted Patent Utility
US 6,462,367 · App. 09/888,891

RuSixOy-containing adhesion layers

Inventors: Eugene P. Marsh, Brenda D. Kraus
Patented Case View Patent ↗
Granted: Oct 8, 2002 Filed: Jun 25, 2001
Inventors
Eugene P. Marsh
Brenda D. Kraus
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,462,367
App. No.
09/888,891
Filed
2001-06-25
Granted
2002-10-08
Kind
B2