Granted Patent
Utility
US 6,462,409 · App. 09/876,259
Semiconductor wafer polishing apparatus
Inventors:
Krishnashree Achuthan, Christy Mei-Chu Woo
Patented Case
View Patent ↗
Granted: Oct 8, 2002
Filed: Jun 6, 2001
Inventors
Krishnashree Achuthan
Christy Mei-Chu Woo
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.