Granted Patent
Utility
US 6,462,565 · App. 09/644,992
Measuring pattern for measuring width of wire in semiconductor device
Inventors:
Kil-Ho Kim, Kang Sup SHIN, Jong-Il Kim
Patented Case
View Patent ↗
Granted: Oct 8, 2002
Filed: Aug 24, 2000
Inventors
Kil-Ho Kim
Kang Sup SHIN
Jong-Il Kim
Assignee (at issue)
SK hynix Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.