Granted Patent
Utility
US 6,464,448 · App. 09/145,008
Substrate transport apparatus
Inventor:
Tuan Ha
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Sep 1, 1998
Inventor
Tuan Ha
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.