Granted Patent
Utility
US 6,464,563 · App. 09/860,226
Method and apparatus for detecting dishing in a polished layer
Inventor:
Kevin R. Lensing
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: May 18, 2001
Inventor
Kevin R. Lensing
Assignee (at issue)
Advanced Microdevices Pvt Ltd
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.