Granted Patent
Utility
US 6,464,564 · App. 09/838,298
System for real-time control of semiconductor wafer polishing
Inventors:
Gurtej S. Sandhu, Trung T. Doan
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Apr 18, 2001
Inventors
Gurtej S. Sandhu
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.