Granted Patent
Utility
US 6,464,847 · App. 09/763,248
Sputtering target
Inventors:
Yoshikazu Kumahara, Keiichi Ishizuka
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Feb 20, 2001
Inventors
Yoshikazu Kumahara
Keiichi Ishizuka
Assignee (at issue)
Nikko-Materials Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.