Granted Patent
Utility
US 6,465,044 · App. 09/542,612
Chemical vapor deposition of silicon oxide films using alkylsiloxane oligomers with ozone
Inventors:
Sanjeev Kumar Jain, Zheng Yuan
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Apr 4, 2000
Inventors
Sanjeev Kumar Jain
Zheng Yuan
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.