Granted Patent
Utility
US 6,465,161 · App. 09/600,612
Method for forming resist pattern
Inventors:
Wen-Bing Kang, Shoko Matsuo, Ken Kimura, Yoshinori Nishiwaki, Hatsuyuki Tanaka
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Jul 17, 2000
Inventors
Wen-Bing Kang
Shoko Matsuo
Ken Kimura
Yoshinori Nishiwaki
Hatsuyuki Tanaka
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.