Granted Patent
Utility
US 6,465,264 · App. 09/654,612
Method for producing semiconductor device and apparatus usable therein
Inventors:
Ryuji Kohno, Hiroya Shimizu, Masatoshi Kanamaru, Atsushi Hosogane, Toshio Miyatake, Hideo Miura, Tatsuya Nagata, Yoshishige Endo, Masaaki Namba, Yuji Wada
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Sep 1, 2000
Inventors
Ryuji Kohno
Hiroya Shimizu
Masatoshi Kanamaru
Atsushi Hosogane
Toshio Miyatake
Hideo Miura
Tatsuya Nagata
Yoshishige Endo
Masaaki Namba
Yuji Wada
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.