Granted Patent
Utility
US 6,465,403 · App. 09/701,114
Silicate-containing alkaline compositions for cleaning microelectronic substrates
Inventor:
David C. Skee
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Nov 17, 2000
Inventor
David C. Skee
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.