Granted Patent
Utility
US 6,466,601 · App. 09/834,840
Beam seal for line narrowed production laser
Inventors:
Xiaojiang Pan, Vladimir Kulgeyko
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Apr 13, 2001
Inventors
Xiaojiang Pan
Vladimir Kulgeyko
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.