Granted Patent
Utility
US 6,468,137 · App. 09/656,665
Method for polishing a memory or rigid disk with an oxidized halide-containing polishing system
Inventors:
Mingming Fang, Shumin Wang
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Sep 7, 2000
Inventors
Mingming Fang
Shumin Wang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.