Granted Patent
Utility
US 6,468,357 · App. 10/123,197
Remover for a ruthenium containing metal and use thereof
Inventors:
Hidemitsu Aoki, Kaori Watanabe, Norio Ishikawa, Kiyoto Mori
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Apr 17, 2002
Inventors
Hidemitsu Aoki
Kaori Watanabe
Norio Ishikawa
Kiyoto Mori
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.