Granted Patent
Utility
US 6,468,586 · App. 09/566,605
Environment exchange control for material on a wafer surface
Inventors:
Emir Gurer, Ed C. Lee, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman, Reese Reynolds
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: May 8, 2000
Inventors
Emir Gurer
Ed C. Lee
Tom Zhong
Kevin Golden
John Lewellen
Scott C. Wackerman
Reese Reynolds
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.