Granted Patent
Utility
US 6,468,845 · App. 09/536,642
Semiconductor apparatus having conductive thin films and manufacturing apparatus therefor
Inventors:
Takashi Nakajima, Hideo Miura, Hiroyuki Ohta, Noriaki Okamoto
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Mar 28, 2000
Inventors
Takashi Nakajima
Hideo Miura
Hiroyuki Ohta
Noriaki Okamoto
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.