Granted Patent
Utility
US 6,468,898 · App. 09/672,303
Method of manufacturing semiconductor device
Inventor:
Tatsuya Usami
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Sep 29, 2000
Inventor
Tatsuya Usami
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.