Granted Patent
Utility
US 6,469,597 · App. 09/799,204
Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method
Inventors:
Richard C. Ruby, Paul Bradley, John D. Larson, III
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Mar 5, 2001
Inventors
Richard C. Ruby
Paul Bradley
John D. Larson, III
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.