Granted Patent
Utility
US 6,469,788 · App. 09/820,094
Coherent gradient sensing ellipsometer
Inventors:
David A. Boyd, Ares J. Rosakis, David Owen
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Mar 27, 2001
Inventors
David A. Boyd
Ares J. Rosakis
David Owen
Assignee (at issue)
California Institute of Technology
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.