Granted Patent
Utility
US 6,469,827 · App. 09/631,617
Diffraction spectral filter for use in extreme-UV lithography condenser
Inventors:
William C. Sweatt, Daniel A. Tichenor, Luis J. Bernardez
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Aug 4, 2000
Inventors
William C. Sweatt
Daniel A. Tichenor
Luis J. Bernardez
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.