Granted Patent
Utility
US 6,470,227 · App. 09/204,421
Method and apparatus for automating a microelectric manufacturing process
Inventors:
Murali D. Rangachari, Arun Sharma, Ramesh Balakrishnan, Balaji Pitchaikani
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Dec 2, 1998
Inventors
Murali D. Rangachari
Arun Sharma
Ramesh Balakrishnan
Balaji Pitchaikani
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.