Granted Patent
Utility
US 6,470,946 · App. 09/776,922
Wafer demount gas distribution tool
Inventor:
Bhola De
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: Feb 6, 2001
Inventor
Bhola De
Assignee (at issue)
ANADIGICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.