IP Library › Granted Patent US 6,472,237
Granted Patent Utility
US 6,472,237 · App. 10/033,066

Method and system for determining a thickness of a layer

Inventors: Larry E. Frisa, Karl Mautz
Patented Case View Patent ↗
Granted: Oct 29, 2002 Filed: Oct 26, 2001
Inventors
Larry E. Frisa
Karl Mautz
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 6,472,237
App. No.
10/033,066
Filed
2001-10-26
Granted
2002-10-29
Kind
B1