Granted Patent
Utility
US 6,472,287 · App. 10/090,626
Manufacturing method of semiconductor with a cleansing agent
Inventor:
Masaru Wakabayashi
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: Mar 6, 2002
Inventor
Masaru Wakabayashi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.