Granted Patent
Utility
US 6,472,303 · App. 10/034,242
Method of forming a contact plug for a semiconductor device
Inventors:
Dae-Hee Weon, Seok Kiu Lee
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: Dec 28, 2001
Inventors
Dae-Hee Weon
Seok Kiu Lee
Assignee (at issue)
SK hynix Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.