Granted Patent
Utility
US 6,473,161 · App. 09/866,913
Lithographic projection apparatus, supporting assembly and device manufacturing method
Inventors:
Martinus Agnes Willem Cuijpers, Frank Auer, Robertus Nicodemus Jacobus Van Ballegoij
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: May 30, 2001
Inventors
Martinus Agnes Willem Cuijpers
Frank Auer
Robertus Nicodemus Jacobus Van Ballegoij
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.