IP Library Granted Patent US 6,473,185
Granted Patent Utility
US 6,473,185 · App. 09/800,994

Alignment free interferometer and alignment free method of profiling object surfaces

Inventors: Itai Vishnia, Zvi Bleier
Patented Case View Patent ↗
Granted: Oct 29, 2002 Filed: Mar 7, 2001
Inventors
Itai Vishnia
Zvi Bleier
Assignee (at issue)
PLX, Inc.

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Quick Facts
Patent No.
US 6,473,185
App. No.
09/800,994
Filed
2001-03-07
Granted
2002-10-29
Kind
B2