Granted Patent
Utility
US 6,473,237 · App. 09/801,516
Point array maskless lithography
Inventor:
Wenhui Mei
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: Mar 8, 2001
Inventor
Wenhui Mei
Assignee (at issue)
Ball Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.