Granted Patent
Utility
US 6,474,940 · App. 09/334,308
Turbo molecular pump
Inventors:
Akira Yamauchi, Hideki Enosawa
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jun 16, 1999
Inventors
Akira Yamauchi
Hideki Enosawa
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.