Granted Patent
Utility
US 6,474,987 · App. 09/831,032
Wafer holder
Inventors:
Tetsuya Nakai, Katsuo Arai, Makoto Shinohara, Fumitomo Kawahara, Makoto Saito, Yasuhiko Kawamura
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jul 9, 2001
Inventors
Tetsuya Nakai
Katsuo Arai
Makoto Shinohara
Fumitomo Kawahara
Makoto Saito
Yasuhiko Kawamura
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
Mitsui Engineering & Shipbuilding Co., Ltd.
Shinku Giken Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.