Granted Patent
Utility
US 6,475,334 · App. 09/610,987
Dry etching device and dry etching method
Inventor:
Hideki Harano
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jul 6, 2000
Inventor
Hideki Harano
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.